	(3) Preparation For Purification Preparatory work before purification	(7) Factory Inspection Laboratory bottle inspection (COA)
(2) Dehydration Removing moisture from the crude product,to prepare it for subsequent processes			(6) Filling Achieve fully automated online product filling
(1) Initial Reaction Synthesis and preparation of crude product			(5) Real-time monitoring If any indicator exceeds the standard, return for further purification
	(4) Further Purification A multi-stage refining and adsorption composite process is used to ensure product quality

PH3 6N5

AsH3 6N5

PH3 6N

AsH3 6N

PH3 PV

[6N5] Phosphine (PH₃)

Product Purity	99.99995%	Cylinder Size / Valve Type	47L / DISS 632M
Shelf Life	2 Years	Net Weight (kg)	18Kg

Component	Specification	Unit	Method
Phosphine (PH₃)	≥ 99.99995	%	Difference Method
Moisture (H₂O)	≤ 50	ppbv	Moisture Analyzer
Nitrogen (N₂)	≤ 50	ppbv	GC-PDD
Oxygen (O₂)/Argon (Ar)	≤ 25	ppbv	GC-PDD
Carbon Monoxide (CO)	≤ 25	ppbv	GC-PDD
Carbon Dioxide (CO₂)	≤ 25	ppbv	GC-PDD
Methane (CH₄)	≤ 25	ppbv	GC-PDD
Arsine (AsH₃)	≤ 25	ppbv	GC-PDD
Hydrothion (H₂S)	≤ 25	ppbv	GC-PDD
Ethane (C₂H₆)	≤ 25	ppbv	GC-PDD
Silane (SiH₄)	≤ 25	ppbv	GC-PDD

[6N5] Arsine (AsH₃)

Product Purity	99.99995%	Cylinder Size / Valve Type	47L / DISS 632M
Shelf Life	2 Years	Net Weight (kg)	27Kg

Component	Specification	Unit	Method
Arsine (AsH₃)	≥ 99.99995	%	Difference Method
Moisture (H₂O)	≤ 50	ppbv	Moisture Analyzer
Nitrogen (N₂)	≤ 50	ppbv	GC-PDD
Oxygen (O₂)/Argon (Ar)	≤ 25	ppbv	GC-PDD
Carbon Monoxide (CO)	≤ 25	ppbv	GC-PDD
Carbon Dioxide (CO₂)	≤ 25	ppbv	GC-PDD
Methane (CH₄)	≤ 25	ppbv	GC-PDD
Ethylene (C₂H₄)	≤ 25	ppbv	GC-PDD
Hydrothion (H₂S)	≤ 25	ppbv	GC-PDD
Ethane (C₂H₆)	≤ 25	ppbv	GC-PDD
Silane (SiH₄)	≤ 25	ppbv	GC-PDD

[6N] Phosphine (PH₃)

Product Purity	99.9999%	Cylinder Size / Valve Type	47L / DISS 632M
Shelf Life	2 Years	Net Weight (kg)	18Kg

Component	Specification	Unit	Method
Phosphine (PH₃)	≥ 99.9999	%	Difference Method
Moisture (H₂O)	≤ 200	ppbv	Moisture Analyzer
Nitrogen (N₂)	≤ 200	ppbv	GC-PDD
Oxygen (O₂)/Argon (Ar)	≤ 50	ppbv	GC-PDD
Carbon Monoxide (CO)	≤ 50	ppbv	GC-PDD
Carbon Dioxide (CO₂)	≤ 50	ppbv	GC-PDD
Methane (CH₄)	≤ 50	ppbv	GC-PDD
Arsine (AsH₃)	≤ 50	ppbv	GC-PDD
Hydrothion (H₂S)	≤ 50	ppbv	GC-PDD
Ethane (C₂H₆)	≤ 50	ppbv	GC-PDD
Silane (SiH₄)	≤ 50	ppbv	GC-PDD

[6N] Arsine (AsH₃)

Product Purity	99.9999%	Cylinder Size / Valve Type	47L / DISS 632M
Shelf Life	2 Years	Net Weight (kg)	27Kg

Component	Specification	Unit	Method
Arsine (AsH₃)	≥ 99.9999	%	Difference Method
Moisture (H₂O)	≤ 200	ppbv	Moisture Analyzer
Nitrogen (N₂)	≤ 200	ppbv	GC-PDD
Oxygen (O₂)/Argon (Ar)	≤ 50	ppbv	GC-PDD
Carbon Monoxide (CO)	≤ 50	ppbv	GC-PDD
Carbon Dioxide (CO₂)	≤ 50	ppbv	GC-PDD
Methane (CH₄)	≤ 50	ppbv	GC-PDD
Ethylene (C₂H₄)	≤ 50	ppbv	GC-PDD
Hydrothion (H₂S)	≤ 50	ppbv	GC-PDD
Ethane (C₂H₆)	≤ 50	ppbv	GC-PDD
Silane (SiH₄)	≤ 50	ppbv	GC-PDD

[6N-PV] Phosphine (PH₃ for Photovoltaic)

Product Purity	99.9999%	Cylinder Size / Valve Type	47L / DISS 632M
Shelf Life	2 Years	Net Weight (kg)	18Kg

Component	Specification	Unit	Method
Phosphine (PH3)	≥ 99.9999	%	Difference Method
Moisture (H2O)	≤ 300	ppbv	Moisture Analyzer
Nitrogen (N2)	≤ 300	ppbv	GC-PDD
Oxygen (O2)/Argon (Ar)	≤ 50	ppbv	GC-PDD
Carbon Monoxide (CO)	≤ 50	ppbv	GC-PDD
Carbon Dioxide (CO2)	≤ 50	ppbv	GC-PDD
Methane (CH4)	≤ 50	ppbv	GC-PDD
Arsine (ASH3)	≤ 50	ppbv	GC-PDD
Hydrogen Sulfide (H2S)	≤ 50	ppbv	GC-PDD
Ethane (C2H6)	≤ 50	ppbv	GC-PDD
Silane (SiH4)	≤ 50	ppbv	GC-PDD

Remark: This product is a gas mixture specially designed for the photovoltaic industry. The maximum blending ratio of phosphine shall not exceed 8%.

Market Comparison

Type

Representative Companies

Purity Level

Price Advantage

Delivery Response

International Brands

CYTEC (USA), Daikin (Japan)

99.99995%+

High Price

Long Lead Time

Domestic Peers

Nanda Optoelectronics, Zhengfan Technology

99.9999%

Medium

Medium

ShengTai Chemical

ShengTai Chemical

99.99995%+

High

Fast

Packing & Delivery

0.44-8L Cylinder:

Small cylinder packaging for pure gas:
✓ Positive pressure cylinders
✓ Adsorption cylinders (SDS safety source)
✓ Packaging: 0.44 / 3.2 / 8.0 liters

47L Cylinder

Pure gas specialized for semiconductor customers

Ton Tank

For customers with fixed-specification mixed gas and end customers with medium to low flow rates.

Tube Clamp Vehicle

Mixed gas for high-flow, fixed-specification applications, minimizing the risk to change product packaging.

★ ★ ★ ★ ★ Clients Reference ★ ★ ★ ★ ★

Overseas Clients Air Liquide, Taiyo Nippon Sanso (TNSC), Messer Group

Domestic Clients Northern Special Gas, Bochun Materials, Chuzhou Changxu, Huate Gas, Jiuce Gas, Dalian Creditchem, Suzhou Evett, Tingshen Electronics (Shanghai), Vista Gas, Vital, GenTech, Nata Opto-electronic

Multinational Corporations Bokoo-Tech, DIG Korea (Samsung), IACS_Korea, Taiwan Gigastorage (TSMC), Wonik Korea, Hope Tech (Malaysia)

IC Industry TSMC (Shanghai/Nanjing), Hua Hong Semiconductor, SMIC (Beijing/Shanghai/Shenzhen), Inspur Group

FPD Industry BOE, CSOT, HKC

LED Industry Sanan Optoelectronics, Changelight Group, HC SemiTek, Kaisun Optoelectronics, MTC Semiconductor, Silan Microelectronics

PV Industry JA Solar, Jinko Solar, Hoshine Silicon, Trina Solar

Laser Industry Huaguang Optoelectronics, Sea Light